Vacuum technology encompasses equipment and components for the generation, measurement and application of negative pressure in industry and research. Key components include vacuum pumps of all types (rotary vane, diaphragm, dry, turbomolecular and diffusion pumps) for rough, fine and high vacuum.
Vacuum chambers of various sizes are used for specific vacuum processes. Vacuum valves regulate the pressure profile and protect the pumps. Vacuum leak detectors with helium detection ensure the leak-tightness of components. Vacuum conveying systems transport bulk materials, powders or granulates without contact.
Leading manufacturers include Leybold, Pfeiffer Vacuum, Edwards, Busch, Ulvac, Atlas Copco, INFICON, Agilent and Becker.
Vacuum technology is used in semiconductor and coating technology, pharmaceutical and food production (vacuum packaging), the glass industry, research laboratories and in woodworking (vacuum clamping tables).